Научная электронная библиотека ULRICH'S Periodicals Directory

Сибирский государственный университет
науки и технологий имени академика М.Ф. Решетнева

Сибирский аэрокосмический журнал
ISSN 2712-8970 (Print) ISSN 2782-5760 (on-line)

Сведения об образовательной организации

UDK UDC 004.07 Doi: 10.31772/2587-6066-2019-20-4-485-496
CONTACT ALGORITHM MEASUREMENT METHOD FOR CURRENT CRYSTALS AREA GROWN BY CZOKHRALSKI METHOD
Sahansky S. P., Yulenkov S. E.
Reshetnev Siberian State University of Science and Technology; 31, Krasnoyarsky Rabochy Av., Krasnoyarsk, 660037, Russian Federation; E-mail: yulenkov_se@sibsau.ru
For crystals grown from the liquid melt according to the Czochralski method when monitoring and controlling the current crystal area based on the contact measurement method, the requirements for improving the accuracy of measuring the crystal area on the cylindrical part of the growth are determined. To eliminate errors due to the accuracy of stabilization of the melt level in the crucible, an algorithm for the operation of the crystal growing unit is proposed which is performed by the programm using the control system. The evaluation time of the control signal on the growing crystal cylindrical part is taken as the sampling time of a given number of crucible movement pulses. The calculation of the control signal starts at the time of the melt level sensor closure, the calculation of the control signal ends at the time of the melt level sensor closure as well, provided that a given number of crucible movement pulses is sampled. The control signal evaluation time in the previous control cycle is used in the current cycle to calculate the melt level sensor closing and opening pause. In the control system at the moment of the contact sensor closure a pause of the closed and the same subsequent pause of the open state of the level sensor is held. During pauses, the status of the contact sensor is not analyzed by the control system and the control of the crucible ascent occurs at a slowed down and accelerated rate of the crucible ascent during “conditionally” closed and “conditionally” open states of the level sensor. The control system is permanently reset at the end of each control cycle. The program control system provides the above algorithm for controlling the process of growing crystals from the liquid melt according to the Czohralski method, at the same time the accuracy of determining the current area of the grown crystal is about 1 %.
Keywords: growth, crystals, melt level sensor.
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Sahansky Sergei Pavlovich – Dr. Sc., Professor; Reshetnev Siberian University of Science and Technology.
Yulenkov Svyatoslav Evgenievich – PhD student; Reshetnev Siberian University of Science and Technology.
E-mail: yulenkov_se@sibsau.ru.


  CONTACT ALGORITHM MEASUREMENT METHOD FOR CURRENT CRYSTALS AREA GROWN BY CZOKHRALSKI METHOD