UDK 621.383 DoI: 10.31772/2587-6066-2018-19-1-137-145
INFLUENCE OF THE In/Ga RELATION IN THE GAS PHASE ON THE CHARACTERISTICS OF THE InXGa1-XP EPITAXIAL LAYERS OF CASCADE SOLAR CELLS
A. A. Naumova1*, A. A. Lebedev1, 2, B. V. Zhalnin1, E. V. Slyshchenko1, 2, N. T. Vagapova1
1JSC “Research-production enterprise “Kvant” 16, 3-rd Mytish chinskaya, Moscow, 129626, Russian Federation 2The National University of Science and Technology “MISiS” 4, Leninsky Av., Moscow, 119049, Russian Federation *E-mail: otdel_17@npp.kvant.ru
The modern solar arrays for the most spacecrafts consists of solar cells which are formed by the thirty nano- and micro-dimensional epitaxial layers based on AIIIBV materials forming triple junction InGaP / InGaAs / Ge. This article presents the results of a study of experimental samples of thin single-crystal epitaxial InxGa1-xP layers with different indium and gallium concentrations (x = 38 to 53 %) that were grown on Ge – substrate by MOCVD industrial equipment. The theme of present investigation is the influence of epitaxial growth parameters on the crystal structure characteristics. The ratio of the components of the third group in the gas phase were calculated from the specified technological parameters. The rocking curves obtained by high-resolution two-crystal X-ray diffractometry were investigated. The lattice parameter and the ratio of indium to gallium in the solid phase were calculated. A high perfection of a singlecrystal structure with an insignificant broadening of the X-ray diffraction peaks was observed in the range from 45 to 53 %. It is shown that the broadening of the diffraction peak of the structure can be the criterion of estimation of the quality of the grown structure in addition to the mismatch of diffraction maximum. Also the In / (In + Ga) ratio in the solid phase was calculated using the method of photoluminescence effect measuring. It was shown in comparison of data of x-ray diffraction with photoluminescence method the composition determination by photoluminescence method should be considered only as estimated.
solar cell, solar battery, epitaxial layer, gas-phase epitaxy, photoelectric converter, X-ray diffractometry, photoluminescence, AIIIBV, semiconductor structure.
References

1. Alferov Zh. I., Andreev V. M., Rumyantsev V. D. [Trends and prospects for the development of solar photovoltaics]. Fizika i tekhnika poluprovodnikov. 2004, Vol. 38, No. 8, P. 6–12 (In Russ.).

2. Zhalnin B. V., Kagan M. B., Semenov V. V. et al. [Development and creation of pilot production of nanostructured cascade solar cells in the A3B5 system]. In/(In+Ga) Avtonomnaya energetika: tekhnicheskiy progress i ekonomika. 2009, No. 26, P. 6–12 (In Russ.).

3. Lebedev A. A., Tsynikin S. A., Lednev A. M. et al. [System for monitoring the parameters of epitaxial growth of semiconductor nanoheterostructures of solar cells for space applications]. Avtonomnaya energetika: tekhnicheskiy progress i ekonomika. 2013, No. 31, P. 15–24 (In Russ.).

4. Naumova A. A. [Determination of the lattice parameter of thin single-crystal InxGa1–xP epitaxial layers on Ge substrate]. Tezisy doklada 71-e Dni nauki studentov NITU “MISiS” mezhdunarodnye, mezhvuzovskie i institutskie nauchno-tekhnicheskie konferentsii [Theses of the report 71st Days of Science of Students of NITU “MISiS” international, interuniversity and institute scientific and technical conferences]. Moscow, 2016, P. 440–441 (In Russ.).

5. Tsynikin S. A., Lebedev A. A., Zhalnin B. V. RCPAnalysisVer 1.0 Programma dlya analiza i sravneniya retseptov Veeco, ikh vizualizatsii v vide grafikov i obrazov, real’nykh geterostruktur, sopostavleniya retseptov s eksperimental’nymi dannymi [RCPAnalysis Ver 1.0 Program for the analysis and comparison of Veeco recipes, their visualization in the form of graphs and images, real heterostructures, comparison of recipes with experimental data]. Certificate of state registration of the program RF № 2014662698, 13.10.2014.

6. Lebedev A. A., Lednev A. M., Tsynikin S. A. [Construction of a system for tracking the technology of manufacturing solar cells for space applications based on A3B5 compounds]. Tezisy dokladov XX Nauchno-tekhnicheskoy konferentsii molodykh uchenykh i spetsialistov OAO “RKK “Energiya” im. S. P. Koroleva” [Abstracts of the XX Scientific and Technical Conference of Young Scientists and Specialists of OJSC “RKK “Energia”, S. P. Korolev”], Korolev, 2014, P. 385–386.

7. Andreev V. M., Dolginov L. M., Tret’yakov D. N. Zhidkostnaya epitaksiya v tekhnologii poluprovodnikovykh priborov [Liquid epitaxy in semiconductor technology]. Moscow, Sovetskoe radio Publ., 1975, P. 328.

8. Stringfellow G. B. Organometallic Vapor-Phase Epitaxy. Theory and Practice. Academic Press, second edition. 1999, Р. 240–253.

9. Brieland W. G., Coltrin M. E., Creighton J. R. at al. Organometallic vapor phase epitaxy (OMVPE). Materials Science and Engineering. 1999, R24, Р. 49.

10. Lebedev A. A., Tsynikin S. A., Lednev A. M. [Program for visualization and evaluation of the inhomogeneity of epitaxial growth of semiconductor nanoheterostructures in the manufacture of solar cells for space applications]. Sbornik materialov molodezhnoy konferentsii “Novye materialy i tekhnologii v raketno-kosmicheskoy i aviatsionnoy tekhnike” [Collection of materials of the youth conference “New Materials and Technologies in Rocket-Space and Aviation Engineering”]. Zvezdnyy gorodok, 2013, P. 54–60 (In Russ.).

11. High performance chemicals for advanced semiconductor application. SAFC Hitech Enabling Technology. Available at: www.safchitech.com (accessed 10.11.2015).

12. Bouen D. K., Tanner B. K. Vysokorazreshayushchaya rentgenovskaya difraktometriya i topografiya [High-resolution x-ray diffractometry and topography]. St. Petersburg, Nauka Publ., 2002, P. 61–80.

13. Shaskol’skaya M. P. Kristallografiya [Crystallography]. Moscow, Vysshaya shkola Publ., 1984, P. 93–106.

14. Tsynikin S. A. SWComplexAnalysis. Certificate of state registration of the program RF № 2013610577, 20.03.2013.

15. Levinshtein M., Rumyantsev S., Shur M. Handbook series semiconductor parameters. IoffeInstitute and Rensselaer Polytechnic Institute. 1999, Vol. 2, P. 37–62.

16. Platonov N. D. [Investigation of growth conditions for highly homogeneous epitaxial single-crystal heterostructures based on AlxGa1–xAs, InxGa1–xAs, InxGa1–xP, created by the MOSGFE method]. Tezisy doklada 70-e Dni nauki studentov NITU “MISiS” mezhdunarodnye, mezhvuzovskie i institutskie nauchno-tekhnicheskie konferentsii [Theses of the report 70st Days of Science of Students of NITU “MISiS” international, interuniversity and institute scientific and technical conferences]. Moscow, 2015, P. 403 (In Russ.).

17. Platonov N.D. [Investigation of the electrical characteristics of layers of epitaxial single-crystal structures based on In0.01Ga0.99As, depending on the type and degree of doping] Tezisy doklada 71-e Dni nauki studentov NITU “MISiS” mezhdunarodnye, mezhvuzovskie i institutskie nauchno-tekhnicheskie konferentsii [Theses of the report 71st Days of Science of Students of NITU “MISiS” international, interuniversity and institute scientific and technical conferences]. Moscow, 2016, P. 439–440 (In Russ.).

18. Smirnov A. A. [Investigation of experimental structures of the InxGa1–xP / Ge type in order to adapt the ECP method and optimize the technological parameters of the epitaxial growth of semiconductor structures of solar cells]. Tezisy doklada 72-e Dni nauki studentov NITU “MISiS” mezhdunarodnye, mezhvuzovskie i institutskie nauchno-tekhnicheskie konferentsii [Theses of the report 72st Days of Science of Students of NITU “MISiS” international, interuniversity and institute scientific and technical conferences]. Moscow, 2017, P. 426–427 (In Russ.).


Naumova Anastasia Alexandrovna – researcher, JSC “Research and Production Enterprise “Kvant”. E-mail:

otdel_17@kvant.ru.

Lebedev Andrey Alexandrovich – senior research scientist, JSC “Research and Production Enterprise “Kvant”;

the 2nd category engineer, Department of Physical Chemistry, National Research Technological University “MISIS”.

E-mail: otdel_17@kvant.ru.

Zhalnin Boris Viktorovich – Cand. Sc., head of department, JSC “Research and Production Enterprise “Kvant”.

E-mail: otdel_17@kvant.ru.

Slyshchenko Evgeny Vitalievich – vice-head of the department, JSC “Research and Production Enterprise

“Kvant”; the 1st category engineer of Department of Nanostructured energy converters, National Research

Technological University “MISIS”. E-mail: otdel_17@kvant.ru.

Vagapova Nargiza Tukhtamyshevna – Cand. Sc., leading researcher, JSC “Research and Production Enterprise

“Kvant”. E-mail: otdel_17@kvant.ru.


  INFLUENCE OF THE In/Ga RELATION IN THE GAS PHASE ON THE CHARACTERISTICS OF THE InXGa1-XP EPITAXIAL LAYERS OF CASCADE SOLAR CELLS